期刊
OPTICS EXPRESS
卷 23, 期 5, 页码 6846-6857出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.23.006846
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资金
- Natural Science Foundation of China (NSFC) [61201355, 61377017, 61405122]
- Sino-German Center for Research Promotion (SGCRP) [GZ 760]
- Scientific and Technological Project of the Shenzhen government [JCYJ20140509172609158, JCYJ20140828163633999]
- State Key Laboratory of Precision Measuring Technology and Instruments (Tianjin University)
Three-dimensional (3D) imaging and metrology of microstructures is a critical task for the design, fabrication, and inspection of microelements. Newly developed fringe projection 3D microscopy is presented in this paper. The system is configured according to camera-projector layout and long working distance lenses. The Scheimpflug principle is employed to make full use of the limited depth of field. For such a specific system, the general imaging model is introduced to reach a full 3D reconstruction. A dedicated calibration procedure is developed to realize quantitative 3D imaging. Experiments with a prototype demonstrate the accessibility of the proposed configuration, model, and calibration approach. (C) 2015 Optical Society of America
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