Filament Temperature Dependence of the Nano-size MgO Particles Prepared by the HWCVD Technique

Metal oxide nanoparticles play an important role in many nanotechnical applications. Among these, magnesium oxide has attracted great attention in different applications. Here, hot wire chemical vapor deposition (HWCVD) method was employed for the deposition of magnesium oxide nanoparticles on pre-ultrasonically cleaned P type Si (111) substrates of 1 cm x 1 cm. High purity magnesium ribbon was heated up to high temperatures in the vicinity of tungsten filament in oxygen surrounding medium at a constant working pressure. The samples were deposited by the proposed method and their properties were studied by Scanning Electron Microscopy (SEM), X-ray Diffraction (XRD) and Energy Dispersive X-Ray spectroscopy (EDAX). The key parameters of our experiments including results of changes in filament temperature on the properties of Magnesium oxide nanoparticles are presented here. The mean size of the nano MgO Particles was between 80-120 nm.