期刊
JOURNAL OF EXPERIMENTAL NANOSCIENCE
卷 7, 期 4, 页码 378-389出版社
TAYLOR & FRANCIS LTD
DOI: 10.1080/17458080.2010.529171
关键词
CVD diamond films; hydrogen; ERDA
类别
资金
- Chinese Academy of Sciences [KJCX3.SYW.N10]
- National Natural Science Foundation of China [10775171]
- Government of Pakistan
Hydrogen-incorporated nanocrystalline diamond thin films have been deposited in microwave plasma enhanced chemical vapour deposition (CVD) system with various hydrogen concentrations in the Ar/CH4 gas mixture. The bonding environment of carbon atoms was detected by Raman spectroscopy and the hydrogen concentration was determined by elastic recoil detection analysis. Incorporation of H-2 species into Ar-rich plasma was observed to markedly alter the microstructure of diamond films. Raman spectroscopy results showed that part of the hydrogen is bonded to carbon atoms. Raman spectra also indicated the increase of non-diamond phase with the decrease in crystallite size. The study addresses the effects of hydrogen trapping in the samples when hydrogen concentration in the plasma increased during diamond growth and its relation with defective grain boundary region.
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