期刊
JOURNAL OF ENVIRONMENTAL SCIENCES
卷 21, 期 6, 页码 741-744出版社
SCIENCE PRESS
DOI: 10.1016/S1001-0742(08)62334-7
关键词
TiO2 film; anatase; UV induced photocatalysis; DC pulse magnetron sputtering
资金
- Dalian Foundation for Development of Science and Technology [2006A13GX029]
- Saitama Institute of Technology
TiO2 films were deposited at room temperature by DC pulse magnetron sputtering system. The crystalline structures, morphological features and photocatalytic activity of TiO2 films were systematically investigated by X-ray diffraction (XRD), atomic force microscopy (AFM) and ultraviolet spectrophotometer, respectively. The results indicated that working pressure was the key deposition parameter influencing the TiO2 film phase composition at room temperature, which directly affected its photocatalytic activity. With increasing working pressure, the target self-bias decreases monotonously. Therefore, low temperature TiO2 phase (anatase) could be deposited with high working pressure. The anatase TiO2 films deposited with 1.4 Pa working pressure displayed the highest photocatalytic activity by the decomposition of Methyl Orange solution, which the degradation rate reached the maximum (35%) after irradiation by ultraviolet light for 1 h.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据