期刊
JOURNAL OF ELECTRONIC MATERIALS
卷 43, 期 4, 页码 828-832出版社
SPRINGER
DOI: 10.1007/s11664-013-2942-z
关键词
Al2O3; band alignment; internal photoemission; flat-band voltage
资金
- Office of Naval Research through the Dielectric Enhancements for Innovative Electronics (DEFINE) MURI
- ONR [N00014-09-1-0242]
The energy band alignments of Ni/Al2O3/GaN heterostructures have been explored by internal photoemission (IPE) and capacitance-voltage (CV) measurements. By performing IPE measurements at both reverse- and forward-bias conditions, the Ni/Al2O3 Schottky barrier is found to be 2.9 +/- 0.1 eV with the presence of a strong image force lowering effect, while the Al2O3/GaN conduction-band offset is determined to be 2.2 +/- 0.1 eV and is insensitive to oxide electrical field. CV-based flat-band voltage analysis has further been performed on samples with different oxide thicknesses, not only confirming the IPE-measured band alignment but also revealing the presence of 3.0 x 10(12) cm(-2) net positive charge at the Al2O3/GaN interface.
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