期刊
JOURNAL OF ELECTRONIC MATERIALS
卷 41, 期 5, 页码 959-964出版社
SPRINGER
DOI: 10.1007/s11664-012-2071-0
关键词
Molecular beam epitaxy; quantum cascade laser; indium arsenide; misoriented substrates; (111)B; piezoelectric effect; strained materials
资金
- AFOSR [FA9550-10-1-0482]
Compared with traditional (100) surfaces, the growth window for achieving high-quality photonic device structures on (111) GaAs by conventional molecular beam epitaxy (MBE) is very narrow. However, strained and unstrained structures produced on (111) substrates offer a new class of electronic and optoelectronic devices that benefit from the piezoelectric effect-a feature not accessible on symmetric (100) orientations-and additional material choices, such as InAs and InGaAs. In this work, we report on a series of investigations of strained and unstrained structures that include GaAs, AlGaAs/GaAs, and InAs/GaAs quantum layers deposited on epi-ready GaAs (111)B 2 degrees -> [2 (1) over bar(1) over bar ]Si-doped substrates by conventional MBE.
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