期刊
JOURNAL OF ELECTROCERAMICS
卷 29, 期 2, 页码 133-138出版社
SPRINGER
DOI: 10.1007/s10832-012-9746-z
关键词
MEMS; Piezoelectric Transformer; PSZT; Piezoelectric coefficients
资金
- Polish Ministry of Science and Higher Education [NN507 352635]
- Grant Agency of the Czech Republic [GACR P102/10/1139]
Effect of Sr content in lead zirconate titanate PZT ceramic system on performance of piezoelectric transformer application were studied. Our experiments provide consistent evaluation of doping strontium amount on piezoelctric coefficients values and final voltage gain and efficiency of piezoelectric transformer. Extreme values of these parameters are preferred for MEMS device effective driving. Modification of ferroelectric materials with isovalent ions, however with the bigger radii than the original atoms, significantly affects their properties. Particularly the electromechanical coefficients of (Pb1-xSrx)(Zr0,70Ti0,30)O-3, for mole %'s as x = 0.05, 0.10 and 0.15 ceramics exhibit marked increase, if the PSZT material stoichiometry is near the ferroelectric/relaxor phase boundary. To determine the piezoelectric coefficients, the resonance-antiresonance method was implemented. The results indicated that addition of Sr2+ ions in the amount of 5 mol% in the ceramic structure maximally increased the values of piezoelectric parameter to d(31) = 8.2 pC/N and mechanical quality factor Q(m) = 2902. Finally we demonstrated that in spite of the high piezoelectric coefficients for certain material only the practical examination must be applied in order to draw decisive application conclusions due to the complexity of the double energy conversion in such a specific device as the piezoelectric transformer.
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