期刊
JOURNAL OF CRYSTAL GROWTH
卷 372, 期 -, 页码 105-108出版社
ELSEVIER
DOI: 10.1016/j.jcrysgro.2013.03.020
关键词
Low pressure metalorganic vapor phase epitaxy; Graphene; Nitrides; Semiconducting III-V materials
We report the growth and characterization of group III-nitride semiconductor layers on graphene grown by chemical vapour deposition. GaN, AlGaN alloys, and InN layers are grown using an AlN nucleation and a buffer layer. We investigate the effect of varying growth temperature and V/III ratio and show that under optimized growth conditions preferentially semipolar (10 (1) over bar1) oriented nitride layers can be obtained. These layers, though polycrystalline, are highly oriented and show strong room temperature photoluminescence, thus showing graphene to be a novel substrate for the growth of III-nitride materials. (C) 2013 Elsevier B.V. All rights reserved.
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