期刊
JOURNAL OF CRYSTAL GROWTH
卷 348, 期 1, 页码 15-19出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jcrysgro.2012.03.047
关键词
Crystal structure; Atomic layer deposition; Tin oxide; Yttria-stabilized zirconia
资金
- National Research Foundation of Korea (NRF)
- Ministry of Education, Science and Technology (MEST) [2011-0000147]
SnO2 thin films were deposited on (100), (110), and (111) yttria-stabilized zirconia (YSZ) substrates using plasma enhanced atomic layer deposition (PEALD), and their structural, electrical, and optical properties were investigated. X-ray diffraction, X-ray pole figure, and high resolution TEM analyses revealed that orthorhombic (100) and (110) SnO2 films were hetero-epitaxially grown on (100) and (110) YSZ, respectively. The determined in-plane orientation relationships were [010](C-SnO2) parallel to [010](YSZ) and [001](C-SnO2) parallel to [001](YSZ) ((100)YSZ) and [1 (1) over bar0](C-SnO2) parallel to [1 (1) over bar0](YSZ) and [00 (1) over bar](C-SnO2) parallel to [00 (1) over bar](YSZ) ((110)YSZ). However, polycrystalline rutile SnO2 films were deposited on the (111) YSZ substrate. All the SnO2 films exhibited a similar electrical resistivity of similar to 2 x 10(-2) Omega cm and the average transmittance of 78% in the visible range and thus the electrical and optical properties were not noticeably changed with film orientation and phase. (C) 2012 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据