4.4 Article Proceedings Paper

Effective simulation of the effect of a transverse magnetic field (TMF) in Czochralski Silicon growth

期刊

JOURNAL OF CRYSTAL GROWTH
卷 360, 期 -, 页码 18-24

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ELSEVIER SCIENCE BV
DOI: 10.1016/j.jcrysgro.2011.11.075

关键词

Computer simulation; Convection; Magnetic fields; Czochralski method; Magnetic field assisted Czochralski method; Semiconducting silicon

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An original numerical technique is used to very efficiently simulate the global heat transfer and 3D melt flow in the Czochralski growth of large silicon crystals under the effect of a transverse magnetic field. Several problems are solved including the simulation of an industrial-size furnace while a comparison is successfully drawn with the literature. The Hartmann and parallel layers located along the crystal and crucible walls are well-captured by our method and show to play a key role in the solution iterative search and to strongly affect the transport of oxygen to the crystal. (C) 2012 Elsevier B.V. All rights reserved.

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