期刊
JOURNAL OF CRYSTAL GROWTH
卷 360, 期 -, 页码 18-24出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jcrysgro.2011.11.075
关键词
Computer simulation; Convection; Magnetic fields; Czochralski method; Magnetic field assisted Czochralski method; Semiconducting silicon
An original numerical technique is used to very efficiently simulate the global heat transfer and 3D melt flow in the Czochralski growth of large silicon crystals under the effect of a transverse magnetic field. Several problems are solved including the simulation of an industrial-size furnace while a comparison is successfully drawn with the literature. The Hartmann and parallel layers located along the crystal and crucible walls are well-captured by our method and show to play a key role in the solution iterative search and to strongly affect the transport of oxygen to the crystal. (C) 2012 Elsevier B.V. All rights reserved.
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