期刊
JOURNAL OF CRYSTAL GROWTH
卷 312, 期 18, 页码 2616-2619出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jcrysgro.2010.04.022
关键词
Characterization; Impurities; Hydride vapor phase epitaxy; Nitrides; Semiconductors III-V materials
High voltage GaN Schottky diodes require a thick blocking layer with an exceptionally low carrier concentration. To this aim, a metal organic chemical vapor deposition process was developed to create a (14 mu m) thick stress-free homoepitaxial GaN film. Low temperature photoluminescence measurements are consistent with low donor background and low concentration of deep compensating centers. Capacitance-voltage measurements performed at 30 degrees C verified a low level of about 2 x 10(15) cm(-3) of n-type free carriers (unintentional doping), which enabled a breakdown voltage of about 500 V. A secondary ion mass spectrometry depth profile confirms the low concentration of background impurities and X-ray diffraction extracted a low dislocation density in the film. These results indicate that thick GaN films can be deposited with free carrier concentrations sufficiently low to enable high voltage rectifiers for power switching applications. (C) 2010 Elsevier B.V. All rights reserved.
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