期刊
JOURNAL OF BIOPHOTONICS
卷 2, 期 4, 页码 212-226出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/jbio.200910010
关键词
sensing; optical sensing; integrated optics; microresonators; integrated sensing; integrated microfluidics
Medicine, environmental monitoring, and security are application areas for miniaturized, portable sensing systems. The emerging integration of sensors with other components (electronic, photonic, fluidic). is moving sensing toward higher levels of portability through the realization of self-contained chip scale sensing. systems. Planar optical sensors, and in particular, microresonator sensors, are attractive components for scale integrated sensing systems because they are. small have high sensitivity, can be surface customized; and can be integrated singly or in arrays in a planar format with other components using conventional semiconductor fabrication technologies. This paper will focus on the progress and prospects for the integration of microresonator sensors at the chip scale with photonic input/output components and with sample preparation microfluidics, toward self-contained., portable sensing systems.
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