4.6 Article

Dynamics of polymer film formation during spin coating

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JOURNAL OF APPLIED PHYSICS
卷 116, 期 12, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.4896674

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  1. Engineering and Physical Sciences Research Council [EP/E04591X/01]
  2. EPSRC [EP/E04591X/1] Funding Source: UKRI
  3. Engineering and Physical Sciences Research Council [EP/E04591X/1] Funding Source: researchfish

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Standard models explaining the spin coating of polymer solutions generally fail to describe the early stages of film formation, when hydrodynamic forces control the solution behavior. Using in situ light scattering alongside theoretical and semi-empirical models, it is shown that inertial forces (which initially cause a vertical gradient in the radial solvent velocity within the film) play a significant role in the rate of thinning of the solution. The development of thickness as a function of time of a solute-free liquid (toluene) and a blend of polystyrene and poly(methyl methacrylate) cast from toluene were fitted to different models as a function of toluene partial pressure. In the case of the formation of the polymer blend film, a concentration-dependent (Huggins) viscosity formula was used to account for changes in viscosity during spin coating. A semi-empirical model is introduced, which permits calculation of the solvent evaporation rate and the temporal evolution of the solute volume fraction and solution viscosity. (C) 2014 Author(s).

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