Parametric amplification in a micro Coriolis mass flow sensor

We report on the application of parametric amplification to a micro Coriolis mass flow sensor. We demonstrate that this mechanism allows for reduction of the system's power dissipation while retaining sensitivity to flow. By reducing this power dissipation, less heat will be transferred to the fluid and channel, potentially resulting in reduced temperature-induced variations of the flow measurements. We present the necessary models to describe and predict the effect of parametric amplification and show their applicability and validity to the Coriolis flow sensor. (C) 2014 AIP Publishing LLC.