期刊
JOURNAL OF APPLIED PHYSICS
卷 113, 期 9, 页码 -出版社
AIP Publishing
DOI: 10.1063/1.4794028
关键词
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资金
- Nonmetallic Inorganic Materials Group (SEM)
- Surface Science and Technology Group (thermal evaporation)
- FIRST Center for Micro- and Nanoscience (sputtering) at ETH Zurich
When thin metal films are annealed they can degrade into particles. This happens even at annealing temperatures below the melting point and is known as solid-state dewetting or agglomeration. The solid-state dewetting behaviour of 15-35 nm thick Au and 20 nm thick AuPt films on SiNx/SiO2/Si substrates was investigated in the temperature range of 500-900 degrees C in air. Morphology maps were created based on which a dewetting zone model is proposed. The morphology maps can be divided into three zones: a zone where the film remains continuous, a zone where dewetting takes place, and a zone where dewetting is complete. Coverage measurements can be used to determine zone boundaries and the activation energy for void growth, which was 1.05+/-0.1 eV in the case of Au. The influence of film thickness and alloying on the dewetting behaviour was studied; both factors had only an influence at low annealing temperatures, with the influence of alloying being more pronounced than the influence of film thickness. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4794028]
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