期刊
JOURNAL OF APPLIED PHYSICS
卷 113, 期 21, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4808310
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资金
- U.S. Department of Energy [DE-FG36-09GO19001]
- National Science Foundation (NSF)
- Department of Energy (DOE) under NSF CA [EEC-1041895]
- German Department of Environment and Nuclear Safety [032765H9]
- Ministry of Science, Research and the Arts of Baden-Wurttemberg, Germany
- NSF
- Martin Family Society of Fellows at MIT
- U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences [DE-AC02-06CH11357]
The efficacy of higher-temperature gettering processes in reducing precipitated iron concentrations is assessed by synchrotron-based micro-X-ray fluorescence. By measuring the same grain boundary before and after phosphorus diffusion in a set of wafers from adjacent ingot heights, the reduction in size of individual precipitates is measured as a function of gettering temperature in samples from the top of an ingot intentionally contaminated with iron in the melt. Compared to a baseline 820 degrees C phosphorus diffusion, 870 degrees C and 920 degrees C diffusions result in a larger reduction in iron-silicide precipitate size. Minority carrier lifetimes measured on wafers from the same ingot heights processed with the same treatments show that the greater reduction in precipitated metals is associated with a strong increase in lifetime. In a sample contaminated with both copper and iron in the melt, significant iron gettering and complete dissolution of detectable copper precipitates is observed despite the higher total metal concentration. Finally, a homogenization pre-anneal in N-2 at 920 degrees C followed by an 820 degrees C phosphorus diffusion produces precipitate size reductions and lifetimes similar to an 870 degrees C phosphorus diffusion without lowering the emitter sheet resistance. (C) 2013 AIP Publishing LLC.
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