In this paper, modeling of light propagation in silicon thin film solar cells without using any fitting parameter is presented. The aim is to create a realistic view of the light trapping effects and of the resulting optical generation rate in the absorbing semiconductor layers. The focus is on real three dimensional systems. Our software Sentaurus TCAD, developed by Synopsys, has the ability to import real topography measurements and to model the light propagation using the finite-difference time-domain method. To verify the simulation, we compared the measured and simulated angular distribution functions of a glass/SnO2:F transparent conducting oxide system for different wavelengths. The optical generation rate of charge carriers in amorphous silicon thin film solar cells including rough interfaces is calculated. The distribution of the optical generation rate is correlated with the shape of the interface, and the external quantum efficiencies are calculated and compared to experimental data. (C) 2011 American Institute of Physics. [doi:10.1063/1.3610516]
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