Piezoelectric properties of 0.5(Ba0.7Ca0.3TiO3)-0.5[Ba(Zr0.2Ti0.8)O3] ferroelectric lead-free laser deposited thin films

Ferroelectric lead-free thin films of 0.5(Ba0.7Ca0.3TiO3) - 0.5[Ba(Zr0.2Ti0.8)O-3] (BCZT) were successfully deposited by pulsed laser deposition on Pt/TiO2/SiO2/Si substrates using a ceramic BCZT target prepared by conventional solid state reaction. The in (1 1 1) direction orientated 600 nm thick films shows a clamped piezoelectric response of approximately d(33,f)=80 pm/V and a dielectric coefficient of about epsilon(r)=1010; these are close to values obtained for lead zirconate titanate (PZT) films. (C) 2011 American Institute of Physics. [doi:10.1063/1.3572056]