期刊
JOURNAL OF APPLIED PHYSICS
卷 109, 期 7, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3537926
关键词
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资金
- EC [043288]
- Fundacao para a Ciencia e a Tecnologia (FCT) [SFRH/BD/32562/2006, PTDC/CTM/66321/2006, PTDC/CTM/73263/2006]
- Associated Lab-Instituto de Nanotecnologias
- EPSRC [EP/H006702/1] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/H006702/1] Funding Source: researchfish
- Fundação para a Ciência e a Tecnologia [PTDC/CTM/73263/2006, SFRH/BD/32562/2006, PTDC/CTM/66321/2006] Funding Source: FCT
Optimized single magnetic bead detection requires magnetic sensors with an improved field detection limit and a sensor area matching the bead cross section (micron size spatial resolution). This work shows that square micron sized tunnel magnetoresistance sensors can be fabricated with integrated longitudinal permanent magnet (PM) biasing that show a linearized field response and low noise. PMs (Co66Cr16Pt18) were integrated in the top lead of an AlOx based magnetic tunnel junction sensor for transfer curve linearization. Sensors patterned with dimensions down to 3 x 3 mu m(2) present field detection limits of 6 nT/Hz(0.5) and 3 nT/Hz(0.5) at 10 kHz and 500 kHz, respectively, corresponding to a field sensitivity of 1.8% per mT (linear field detection range Delta B = -8 mT+8 mT) and alpha(H) 3.9 +/- 0.3 x 10(-10) mu m(2) (RxA = 1.9 k Omega mu m(2)). (C) 2011 American Institute of Physics. [doi:10.1063/1.3537926]
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