期刊
JOURNAL OF APPLIED PHYSICS
卷 107, 期 12, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3436599
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资金
- Natural Science Foundation of China [50832006, 60876001]
- Program 973 [2007CB613403]
- Research Fund for the Doctoral Program of Higher Education [200803350043]
- Zhejiang Provincial Natural Science Fund [R4090055]
The mechanical properties including hardness, Young's modulus, and fracture toughness of heavily phosphorus (P)-doped Czochralski (Cz) silicon have been investigated by means of nanoindentation and microindentation. In view of the results of nanoindentation characterization, it is derived that the hardness of heavily P-doped Cz silicon is essentially the same as that of lightly P-doped Cz silicon. While, the Young's modulus of Cz silicon is to a certain extent decreased by the heavy P-doping. With the same microindentation load, the lengths of the radial and lateral cracks in the heavily P-doped silicon are shorter than those in the lightly P-doped silicon, indicating that the heavily P-doped Cz silicon possesses a higher indentation fracture toughness. (C) 2010 American Institute of Physics. [doi:10.1063/1.3436599]
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