期刊
JOURNAL OF APPLIED PHYSICS
卷 108, 期 10, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3504192
关键词
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资金
- Zijin Project [188020-544802[8]]
- Basic Research Special Foundation of Zhejiang University [2010XZZX001]
Ablation and spallation of gold thin films by an ultrashort laser pulse are simulated by using an integrated two-temperature model and molecular dynamics method with inclusion of the hot electron blast force. The simulation results show that the ultrafast laser-induced nonthermal ablation and spallation both are essentially due to dynamic tensile stress that exceeds the local material strength. It is also demonstrated that a simultaneous use of femtosecond and picosecond laser pulses could induce spallation without causing undesired front-side damage to the film. This may be suited to peel an ultrathin film (1 mu m in thickness or less) from its substrate or to improve the material removal rate of precise laser processing. (C) 2010 American Institute of Physics. [doi:10.1063/1.3504192]
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