An analytic characterization of the harmonic detection of resonance method

While it has proven useful as a sensor and as a system for exploring and examining nonlinear oscillation, the harmonic detection of resonance (HDR) method has not been fully derived and explained analytically. We develop the equation of motion for the oscillation of a cantilever which is electrostatically driven into resonance and compared to experiment. The resonance signal is measured both by a photodetector (mechanical signal) and a charge amplifier (electrical signal) and is found to be in good agreement with the derived equation of motion: Finally; a few nonlinear phenomena observed in our HDR experiments will be examined analytically. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3204668]