4.6 Article

Fully voltage-controlled electrohydrodynamic jet printing of conductive silver tracks with a sub-100 μm linewidth

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JOURNAL OF APPLIED PHYSICS
卷 106, 期 2, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.3176952

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  1. Engineering and Physical Sciences Research Council (U.K.) (EPSRC) [EP/E03330X/1]
  2. EPSRC [EP/E03330X/1] Funding Source: UKRI
  3. Engineering and Physical Sciences Research Council [EP/E03330X/1] Funding Source: researchfish

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Silver microtracks with excellent electrical functionality were created by electrohydrodynamic jet (e-jet) printing of commercial metallo-organic ink. Novel e-jet printing was performed in a fully voltage-controlled fashion. By using a 20 mu m nozzle and reducing the printing distance to 50 mu m, metallic tracks with a sub-100 mu m linewidth were successfully achieved on Si substrates. The physical properties of the printed tracks were characterized by means of scanning electron microscopy, atomic force microscopy, energy-dispersive x-ray spectrum analysis, and electrical measurements. A low resistivity in the range (2-4) x 10(-8) Omega m, 1.7-2.4 times of the theoretical value of silver, was obtained for the printed microtracks. A uniform fine track with a 35 mu m feature size was produced by pulsed jet printing operating at low voltage, and a drop-on-demand capability of similar to 7 pl/drop was estimated. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3176952]

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