期刊
JOURNAL OF APPLIED PHYSICS
卷 106, 期 11, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.3268466
关键词
compressive strength; dislocations; gallium compounds; III-V semiconductors; lattice constants; MOCVD; sapphire; scandium compounds; segregation; semiconductor growth; semiconductor thin films; stacking faults; stress relaxation; transmission electron microscopy; vapour phase epitaxial growth; wide band gap semiconductors; X-ray diffraction
资金
- EPSRC
- Austrian Science Fund (FWF) [EP/EC035167/1]
- START Program [Y371]
- EPSRC [TS/G001383/1, EP/H019324/1, EP/E035167/1, EP/G042330/1] Funding Source: UKRI
- Austrian Science Fund (FWF) [Y 371] Funding Source: researchfish
- Engineering and Physical Sciences Research Council [EP/G042330/1, TS/G001383/1, EP/H019324/1, EP/E035167/1] Funding Source: researchfish
- Austrian Science Fund (FWF) [Y371] Funding Source: Austrian Science Fund (FWF)
Scandium gallium nitride (ScxGa1-xN) alloy films with low Sc concentrations (up to approximately x=0.08) were grown using molecular beam epitaxy with NH3 as a reactive N source, on GaN films that were grown on sapphire using metalorganic vapor phase epitaxy (MOVPE). High-resolution x-ray diffraction and transmission electron microscopy revealed that both the c and the a lattice parameters increased with increasing Sc concentration, as predicted for a wurtzite-structure alloy. As the Sc content increased, the relaxation of the compressive stress in the ScxGa1-xN films occurred mainly via the introduction of additional a-type dislocations, but neither stacking faults nor significant compositional segregation was observed at any composition. A dewetting effect (which increased with increasing Sc content) was observed in MOVPE-grown GaN deposited on top of the ScxGa1-xN films, but the ScxGa1-xN remained compositionally and structurally stable under GaN growth conditions.
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