4.6 Article

An analysis of imprinted hysteresis loops for a ferroelectric Pb(Zr,Ti)O3 thin film capacitor using the switching transient current measurements

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JOURNAL OF APPLIED PHYSICS
卷 105, 期 4, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.3078104

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charge injection; dielectric hysteresis; dielectric polarisation; ferroelectric capacitors; ferroelectric switching; ferroelectric thin films; lead compounds; platinum; thin film capacitors; zirconium compounds

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  1. Korean Government

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This study examined the imprint mechanism of a ferroelectric Pt/Pb(Zr,Ti)O-3(150-nm-thick)/Pt capacitor using pulse switching transient current measurements. The progression of the imprint was well explained by the propagation of a localized charge injection area, where there was an increase in coercive voltage and interfacial capacitance over the entire capacitor area. The as-received samples exhibited uniform interfacial capacitance over the total area. Charge injection resulted in a more rectified remanent polarization-applied voltage relationship compared with the as-received sample. Analytic functional forms for the switching charge and local switching area were also derived.

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