期刊
JOURNAL OF APPLIED PHYSICS
卷 104, 期 3, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.2961326
关键词
-
资金
- Korea Science and Engineering Foundation (KOSEF)
- Korean government (MOST) [R01-2007-000-20142-0]
- National Research Foundation of Korea [R01-2007-000-20142-0, 핵06A2802] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
We studied the optical properties of hafnium oxide as its structure changed. The shoulderlike feature that appears in crystalline HfO2 near the energy trough of the optical absorption edge after thermal anneal was found to have a direct correlation with the crystallization of the film. A luminescence feature near 4.1 eV could also be observed for some of the crystallized hafnium oxide films, but it did not have a direct correlation with crystallization or the shoulderlike feature. Our experimental results do not support the recently proposed self-trapped exciton (STE) model, where the shoulderlike absorption and the UV luminescence features are both attributed to STE. Simultaneous measurements of structural and optical properties of thermally annealed hafnium oxide films revealed that the shoulderlike feature is not related to defects, but rather is intrinsic to crystallized hafnium oxides. We discuss some possible origins of the shoulderlike feature based on our experimental results. Nevertheless, the UV luminescence feature seems to be related to oxygen defects in crystalline hafnium oxide. (C) 2008 American Institute of Physics.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据