期刊
NANOTECHNOLOGY
卷 26, 期 33, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/26/33/335301
关键词
ion-track technology; atomic layer deposition; single-pore; polycarbonate membrane; ion transport; nanotubes
资金
- Deutsche Forschungsgemeinschaft [DFG-FOR1583, SFB986 M3]
- graduate school HGS-HIRe
Low-temperature atomic layer deposition (ALD) of TiO2, SiO2, and Al2O3 was applied to modify the surface and to tailor the diameter of nanochannels in etched ion-track polycarbonate membranes. The homogeneity, conformity, and composition of the coating inside the nanochannels are investigated for different channel diameters (18-55 nm) and film thicknesses (5-22 nm). Small angle x-ray scattering before and after ALD demonstrates conformal coating along the full channel length. X-ray photoelectron spectroscopy and energy dispersive x-ray spectroscopy provide evidence of nearly stoichiometric composition of the different coatings. By wet-chemical methods, the ALD-deposited film is released from the supporting polymer templates providing 30 mu m long self-supporting nanotubes with walls as thin as 5 nm. Electrolytic ion-conductivity measurements provide proof-of-concept that combining ALD coating with ion-track nanotechnology offers promising perspectives for single-pore applications by controlled shrinking of an oversized pore to a preferred smaller diameter and fine-tuning of the chemical and physical nature of the inner channel surface.
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