期刊
JOURNAL OF ALLOYS AND COMPOUNDS
卷 495, 期 1, 页码 126-130出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.jallcom.2010.01.100
关键词
Transparent oxide semiconductors; ZnO; Thin film; Sol-gel method; Optical properties
资金
- Taiwan TFT-LCD Association (TTLA) [A643TT1000-S21]
Transparent semiconductor thin films of zinc oxide (ZnO) were deposited onto alkali-free glass substrates by the sol-gel method and spin-coating technique. In this study, authors investigate the influence of the heating rate of the preheating process (4 or 10 degrees C/min) on the crystallization, surface morphology, and optical properties of sol-gel derived ZnO thin films. The ZnO sol was synthesized by dissolving zinc acetate dehydrate in ethanol, and then adding monoethanolamine. The as-coated films were preheated at 300 degrees C for 10 min and annealed at 500 degrees C for 1 h in air ambiance. Experimental results indicate that the heating rate of the preheating process strongly affected the surface morphology and transparency of ZnO thin film. Specifically, a heating rate of 10 degrees C/min for the preheating process produces a preferred orientation along the (002) plane and a high transmittance of 92% at a wavelength of 550 nm. Furthermore, this study reports the fabrication of thin-film transistors (TFTs) with a transparent ZnO active channel layer and evaluates their electrical performance. (C) 2010 Elsevier B.V. All rights reserved.
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