The influence of growth temperature and oxygen on the phase compositions of CuAlO2 thin films prepared by pulsed laser deposition

Single-phase CuAlO2 thin films with (001) orientation were prepared by PLD with ex situ annealing at 1173 K under N-2 atmosphere. The phase compositions of the films were found to be significantly dependent on the deposition oxygen pressure. The optimum deposition oxygen pressure for single-phase CuAlO2 thin films was 2.3-3.2 x 10(-2) Pa. The average transmittance of the similar to 50 nm-thick film in the visible region is similar to 60% and the direct optical band gap is similar to 3.43 eV. The single-phase film has a resistivity of 99.2 Omega cm at 300 K. (C) 2007 Elsevier B.V. All rights reserved.