期刊
JAPANESE JOURNAL OF APPLIED PHYSICS
卷 49, 期 4, 页码 -出版社
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.49.04DG05
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资金
- National Science Council [NSC-98-2221-E-230-001, NSC-95-2221-E-230-026-MY3]
Al0.16Ga0.84N 320nm near-solar-blind ultraviolet (UV) metal-semiconductor-metal photodetectors (MSM-PDs) with a low-temperature AlN (LT- AlN) layer and inductively coupled plasma (ICP) recessed electrodes were successfully fabricated. Compared with the conventional MSM-PDs, it was found that the measured photocurrent was much larger for the MSM-PD with the LT-AlN layer and ICP recessed electrodes. The responsivity of the MSM-PD with the LT-AlN layer and ICP recessed electrodes was also found to be larger, which could be attributed to the ICP-etching-induced photoconductive gain. (C) 2010 The Japan Society of Applied Physics
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