期刊
JAPANESE JOURNAL OF APPLIED PHYSICS
卷 49, 期 4, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1143/JJAP.49.04DH14
关键词
-
The ferroelectric properties of lead zirconate titanate (PZT) films crystallized by a continuous-wave (CW) green laser are discussed in this paper. After CW green laser annealing, two kinds of typical crystallization modes of the PZT thin films were observed: island crystallization and lateral crystallization. In the island crystallization region, the PZT film was crystallized uniformly over the thin films. However, poor surface roughness was found in lateral crystallization region. Significant improvements of ferroelectric characteristics have been achieved in the island crystallization region after optimizing with a low energy density. By varying energy density from 4.5 to 7.1 kW/cm(2) and fixing annealing time at 42.5 ms, significant features were found at an energy density of 5.3 kW/cm(2). A maximum remanent polarization of 27 mC/cm(2) was obtained. (C) 2010 The Japan Society of Applied Physics
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据