期刊
JAPANESE JOURNAL OF APPLIED PHYSICS
卷 48, 期 9, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1143/JJAP.48.090209
关键词
-
We propose a semianalytical rf sheath model for single- and dual-frequency capacitively coupled plasmas (CCPs) based on the finite element method (FEM). The one-dimensional nonlinear rf sheath theory and its extension to dual-frequency CCPs are incorporated into the commercial FEM software COMSOL Multiphysics and coupled with the Poisson solver in it. The model enables a time-dependent but rapid simulation of the nonlinear motion of an rf sheath formed around an arbitrary surface geometry of a local region in a single- or dual-frequency CCP. Some application results obtained using the model are demonstrated and validated. (C) 2009 The Japan Society of Applied Physics
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据