Low-Temperature Recrystallization of Ferroelectric Lead Zirconate Titanate Thin Films on Glass Substrate Using Continuous-Wave Green Laser

A continuous-wave (CW) green laser with the wavelength of 532 nm was employed to crystallize lead zirconate titanate (PZT) films on glass substrates. The firing was local and instantaneous, and annealing time (10(-5)-10(-1) s) was controlled by adjusting the laser scanning speed. After CW green laser annealing, three typical crystallization modes of the PZT thin films were observed, that is, microcrystallization, island crystallization, and lateral crystallization. In the island crystal region, the PZT film was crystallized uniformly and sufficiently over the thin films, and the ferroelectric perovskite c-axis (001) was dominant. In this region the remanent polarization of 13 mu C/cm(2) was achieved. (C) 2009 The Japan Society of Applied Physics