期刊
INTERNATIONAL JOURNAL OF THERMOPHYSICS
卷 36, 期 5-6, 页码 1016-1028出版社
SPRINGER/PLENUM PUBLISHERS
DOI: 10.1007/s10765-014-1801-3
关键词
Elastic bending; Membrane; Photoacoustic; Plasmaelastic; Thermoelastic; Thin film
资金
- Serbian Ministry of Education and Science [OI171016]
Photoacoustic (PA) elastic bending effects have been studied and used to develop the experimental non-contact and non-destructive method that make it possible to investigate the optical, thermal, and elastic properties of thin films. A theoretical model for optically excited thin films on a Si membrane, which includes plasmaelastic, thermoelastic, and thermodiffusion mechanisms, is given. Relations for the PA elastic bending signal in the optically excited two-layer Si membrane are derived. The method was verified by measuring the experimental amplitude and phase of the PA elastic bending of the thin film on Si square membranes and compared with the theoretically calculated spectra. The analysis shows that it is possible to obtain the optical, thermal, and elastic parameters of a film thinner than 1 mu m.
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