期刊
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES
卷 47, 期 14-15, 页码 1871-1875出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.ijsolstr.2010.03.020
关键词
Photothermal; Thermoelasticitic wave; Plasma wave; Semiconducting microcantilever; Vibration
类别
资金
- FFCSA
- National Natural Science Foundation of China [10972169]
- Open Foundation of State Key Laboratory of Structural Analysis of Industrial Equipment [GZ0814]
- Foundation of Xi'an Jiaotong University
- Ministry of Science and Technology Development, Republic of Serbia [11027]
In this paper, the theory of coupled plasma, thermal and elastic wave was used to study the vibration of semiconducting microcantilevers during photothermal process. The generalized thermoelastic model was adopted, along with plasma wave model, to obtain the vibration response of semiconducting microcantilevers under periodical laser excitation. The influence of thermal relaxation time on the vibration was investigated. The conventional and generalized thermoelastic theories for the temperature and deflection of microcantilever were compared. The simulation results for the amplitude and phase versus the modulation frequency revealed that near resonance frequency the generalized hyperbolic thermoelastic model was more suitable to describe the vibration characterization of microcantilevers than the conventional thermoelstic model. (C) 2010 Elsevier Ltd. All rights reserved.
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