期刊
INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS
卷 43, 期 6, 页码 521-526出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.ijnonlinmec.2008.03.001
关键词
AFM; atomic force microscope; chaotic motion; phase space warping; smooth orthogonal decomposition; local flow variation
类别
Local flow variation (LFV) method of non-linear time series analysis is applied to develop a chaotic motion-based atomic force microscope (AFM). The method is validated by analyzing time series from a simple numerical model of a tapping mode AFM. For both calibration and measurement procedures the simulated motions of the AFM are nominally chaotic. However, the distance between a tip of the AFM and a sample surface is still measured accurately. The LFV approach is independent of any particular model of the system and is expected to be applicable to other micro-electro-mechanical system sensors where chaotic motions are observed or can be introduced. (C) 2008 Elsevier Ltd. All rights reserved.
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