4.0 Article

Stress effects on solid-state dewetting of nano-thin films

期刊

INTERNATIONAL JOURNAL OF NANOTECHNOLOGY
卷 9, 期 3-7, 页码 396-411

出版社

INDERSCIENCE ENTERPRISES LTD
DOI: 10.1504/IJNT.2012.045344

关键词

dewetting; strain; stress; SOI; thin films

资金

  1. ANR [ANR 08-nano-036]
  2. APO by Provence-Alpes-Cote d'Azur regional Council

向作者/读者索取更多资源

In this paper, we present a brief survey of stress effects on dewetting. For this purpose, i we develop a simple thermodynamic model to illustrate stress effects ii we study stress effects in strained-Silicon-On-Insulator (s-SOI) thin films by means of Low Energy Electron Microscopy, and Atomic Force Microscopy iii we discuss some available data. In particular, we show that while for s-SOI the strain only provides a relatively small contribution to the total driving force for dewetting, in some other cases stress can really dominate the driving force for the dewetting.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.0
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据