相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。Post-CMOS compatible high-throughput fabrication of AIN-based piezoelectric microcantilevers
A. Perez-Campos et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2015)
Resonantly excited AlN-based microcantilevers for immunosensing
M. J. Oliver et al.
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2012)
Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode
V. Ruiz et al.
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2012)
Aluminum nitride on titanium for CMOS compatible piezoelectric transducers
Joseph C. Doll et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2010)
Synthesis of c-axis oriented AlN thin films on different substrates: A review
G. F. Iriarte et al.
MATERIALS RESEARCH BULLETIN (2010)
Dynamic response of low aspect ratio piezoelectric microcantilevers actuated in different liquid environments
J. Vazquez et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2009)
Static and dynamic characterization of AlN-driven microcantilevers using optical interference microscopy
Katarzyna Krupa et al.
OPTICS AND LASERS IN ENGINEERING (2009)
Effect of surface stress on the stiffness of cantilever plates
Michael J. Lachut et al.
PHYSICAL REVIEW LETTERS (2007)
Behaviour of forbidden modes in the impedance characterization and modeling of piezoelectric microcantilevers
Javier Vazquez et al.
SENSORS AND ACTUATORS A-PHYSICAL (2007)
Energy harvesting MEMS device based on thin film piezoelectric cantilevers
W. J. Choi et al.
JOURNAL OF ELECTROCERAMICS (2006)
The influence of different doping elements on microstructure, piezoelectric coefficient and resistivity of sputtered ZnO film
X. B. Wang et al.
APPLIED SURFACE SCIENCE (2006)
Simulation and design of piezoelectric microcantilever chemical sensors
W Zhou et al.
SENSORS AND ACTUATORS A-PHYSICAL (2005)
Glucose biosensor based on the microcantilever
JH Pei et al.
ANALYTICAL CHEMISTRY (2004)
Surface acoustic wave propagation characteristics of aluminum nitride thin films grown on polycrystalline diamond
GF Iriarte
JOURNAL OF APPLIED PHYSICS (2003)
Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering
MA Dubois et al.
JOURNAL OF APPLIED PHYSICS (2001)
分享论文
