4.3 Article Proceedings Paper

Improving retention properties by thermal imidization for polyimide-based nonvolatile resistive random access memories

期刊

MICROELECTRONICS RELIABILITY
卷 55, 期 11, 页码 2188-2197

出版社

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.microrel.2015.08.013

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Polyimide (PI); Resistive random access memory (ReRAM); Thermal imidization

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In this study, a polyimide (PI) thin film was synthesized as a resistive layer for creating resistive random access memory (ReRAM). The switch between high- and low-resistance states is caused by the formation and dissociation of dipole direction and Schottky barrier. The impact of imidization on memory properties was evaluated in detail by clarifying the transmission mechanism, and reliability properties including retention and endurance were improved using thermal imidization. In addition, the proposed PI-based ReRAM demonstrated superior performance levels compared with those of electrochemical-metallization-based and valence-change-based ReRAMs, including higher R-ON/R-OFF ratio (>10(7)) and lower operation energy (<0.16 MV/cm). (C) 2015 Elsevier Ltd. All rights reserved.

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