期刊
MICROELECTRONIC ENGINEERING
卷 147, 期 -, 页码 15-18出版社
ELSEVIER
DOI: 10.1016/j.mee.2015.04.024
关键词
Ferroelectricity; Multicomponent Hf0.5Zr0.5O2 dielectrics; Atomic layer deposition; Ferroelectric random access memory
资金
- Ministry of Education and Science of Russian Federation [14.576.21.0065]
The structural and electrical properties of Hf0.5Zr0.5O2 thin films after post deposition and post metallization annealing were investigated. The possibility of the annealing without top electrodes for attainment of ferroelectric properties in Hf0.5Zr0.5O2 thin films was demonstrated. It was, however, shown, that the annealing in presence of top electrode leads to the more preferable crystallization to polar o-phase and the increase in the remanent polarization value. The influence of the film thickness on the structural and ferroelectric properties was studied both after post metallization and post deposition annealing. The optimal Hf0.5Zr0.5O2 thickness was found to be equal to similar to 19 nm for electrode free annealing, which is promising value for modern nanoscale ferroelectric devices. (C) 2015 Elsevier B.V. All rights reserved.
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