期刊
MICROELECTRONIC ENGINEERING
卷 132, 期 -, 页码 135-155出版社
ELSEVIER
DOI: 10.1016/j.mee.2014.10.002
关键词
Superhydrophobic; Plasma nanotexturing; Microarrays; Cell arrays; Droplet microfluidics; Hydrophilic
资金
- Research Excellence Project Plasma Directed Assembly and Organization: PlasmaNanoFactory [695]
- European Social Fund (ESF) and National Resources
- Project THALIS-DESIgn and fabrication of Robust supErhyDROPhobic/philic surfaces and their application in the realization of smart microfluidic valves
- Hellenic and European Regional Development Funds (ERDF) under the Hellenic National Strategic Reference Framework (NSRF)
Control of wetting properties at the extremes of wetting states (superhydrophilic and superhydrophobic) is important for many applications, such as self-cleaning, anti-fogging, anti-icing, and antibacterial action. While significant effort has been devoted to develop and characterize such open surfaces for various applications, their incorporation in sensors, microfluidics, and labs on chip, offers new functional devices and systems, and poses different requirements compared to open-area surfaces. In this paper, dedicated to the 30 year anniversary of Microelectronic Engineering, we aim to review the extreme wetting states of surfaces, their fabrication processes focusing on plasma processing technology, and their incorporation into devices and systems. We start with an introduction and terminology for superhydrophilic, superhydrophobic, and superoleophobic surfaces, and continue with a review of the fabrication of such surfaces by plasma processing. We then review how such surfaces are incorporated in microdevices and microsystems, and their applications. We address (a) Hydrophilic capillary pumps and superhydrophobic valves, (b) Drag reduction in superhydrophobic microchannels and slip length increase, (c) Superhydrophobic surfaces for droplet manipulation, applied to chemical and biological analysis, (d) Biomolecule adsorption control on nanostructured surfaces, and (e) Cell adhesion on such surfaces. Finally, we conclude with perspectives and challenges. (C) 2014 Elsevier B.V. All rights reserved.
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