期刊
MICROCHIMICA ACTA
卷 182, 期 11-12, 页码 1991-1999出版社
SPRINGER WIEN
DOI: 10.1007/s00604-015-1539-z
关键词
ZnO; Ethanol; Sensing; Sputtering; Grain size
资金
- European Commission [PITN-GA-2010-265073]
- Romanian Authority for Scientific Research - UEFISCDI [PN-II-RU-PD-2012-3-0124]
We have investigated the gas sensing properties of ZnO thin films (100 to 200 nm thickness) deposited by room-temperature radio frequency magnetron sputtering. The sensitivity of the films to ethanol vapor was measured in the 10 to 50 ppm concentration range at operating temperatures between 200 and 400 A degrees C. A synergetic effect of decreasing grain size and increasing operating temperature was observed towards the improvement of the sensitivity, reaching a value of 54 and a limit of detection as low as 0.61 ppm. The decrease in the grain size resulted in prolonged response time but faster recovery. In any case, both response time and recovery time are < 400 s. The results demonstrate that room-temperature magnetron sputtering is a viable approach to enhance the performances of ZnO films in sensors for ethanol vapor.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据