A study on the micro tooling for micro/nano milling

Many researches have studied the micro tools either by simulations or experiments showing that the micro tools play very important roles in micro/nano machining, and micro tool geometries have a direct impact on the final machining quality. Commercially available micro milling tools are usually simply made from downsizing of macro milling tools, which may not be able to be accurately fabricated. Custom micro milling tools have been created by some researchers, but no design criteria for micro milling tools have been introduced. The above factors constrain the development of effective micro milling tools and consequently constrain the researches on micro/nano milling. Based on former researcher's work, this paper tries to introduce the design criteria for the custom micro tooling. Firstly, the extent typical micro milling tools are studied, and their drawback/limitations are summarized. Secondly, experimental evaluations of the key drawback/limitations are processed. Thirdly, the design criteria for custom micro milling tools are proposed, and corresponding design process is introduced. Then, a new micro hexagonal end mill has been designed based on these criteria. Finally, a polycrystalline diamond micro hexagonal end mill with a diameter of 0.5 mm was fabricated by wire electrical discharge machining, and the evaluation experiments for the hexagonal end mill have been processed on a nano milling center. Experimental results show the newly designed hexagonal end mill can achieve submicron level surface roughness and has simultaneously high-accuracy side and bottom machining capabilities.