期刊
INORGANICA CHIMICA ACTA
卷 422, 期 -, 页码 21-29出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.ica.2014.07.069
关键词
Sensor; Porous silicon; Photonic crystal; Pyrolysis; Carbonization; Surface area
资金
- National Science Foundation - United States [NSF DMR-1210417]
- Tyco Electronics
- Division Of Materials Research
- Direct For Mathematical & Physical Scien [1210417] Funding Source: National Science Foundation
Carbon/porous silicon composite films are prepared by thermolysis of a poly(furfuryl alcohol) (PFA) precursor in a porous silicon photonic crystal template that results in a glassy carbon layer that coats the internal surface of the pores. The carbon/porous silicon composites are evaluated for their application as optical sensors for C-2 hydrocarbon gases. The porous silicon templates are prepared by electrochemical anodization of either highly doped (p++) or moderately doped (p+) p-type silicon. The percent loading of carbon in the composites is varied and the change in reflectance spectrum and sensitivity monitored. Increased carbon loading corresponds to a decrease in the reflectance of the photonic stop band and an increase in sensitivity toward ethane. Sensitivity of the composites toward C-2 hydrocarbons is also found to scale with increasing surface area, with p+ carbon/porous silicon composites having the largest surface area and being the most sensitive. The detection limit for the C-2 hydrocarbons is 0.2% (v/v) in a nitrogen carrier gas, which is >10 times below the lower flammable limit. (C) 2014 Elsevier B. V. All rights reserved.
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