期刊
IEEE-ASME TRANSACTIONS ON MECHATRONICS
卷 15, 期 3, 页码 433-447出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMECH.2009.2028422
关键词
Mechatronics; piezoelectric transducers; position control
In this study, the actuator load force of a nanopositioning stage is utilized as a feedback variable to achieve both tracking and damping. The transfer function from the applied actuator voltage to the measured load force exhibits a zero-pole ordering that greatly simplifies the design and implementation of a tracking and damping controller. Exceptional tracking and damping performance can be achieved with a simple integral controller. Other outstanding characteristics include guaranteed stability and insensitivity to changes in resonance frequency. Experimental results on a high-speed nanopositioner demonstrate an increase in the closed-loop bandwidth from 210 Hz (with an integral controller) to 2.07 kHz (with a force-feedback control). Gain margin is simultaneously improved from 5 dB to infinity.
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