期刊
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
卷 61, 期 12, 页码 2149-2152出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TUFFC.2014.006423
关键词
-
资金
- EU [E!6785 NILSAW]
- Russian Government [11.G34.31.0030, 14.B37.21.1988]
The possibility of using 6-GHz frequencies for passive SAW tags is discussed. An example of an inline 6-GHz SAW tag design is presented. Supposing that an ultrawide frequency bandwidth B = 775 MHz can be used, the tag dimensions can be significantly reduced and the loss of reflected response remains at an acceptable level of around 50 dB. The devices were manufactured using E-beam lithography and, probed on wafer, show performance close to predicted, including the loss level of approximately 55 dB. The possibility of high-throughput manufacturing by combining nano-imprint and e-beam lithography is discussed.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据