期刊
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
卷 60, 期 9, 页码 1978-1988出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TUFFC.2013.2783
关键词
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资金
- National Science Foundation (NSF) Division of Electrical, Communications, and Cyber Systems (ECCS) program [1202523]
- Directorate For Engineering
- Div Of Electrical, Commun & Cyber Sys [1202523] Funding Source: National Science Foundation
- Div Of Electrical, Commun & Cyber Sys
- Directorate For Engineering [1440163] Funding Source: National Science Foundation
In this work, lateral-extensional thin-film piezoelectric-on-diamond (TPoD) filters with very low insertion loss (IL) values (<4 dB) are reported. Two different lateral-extensional modes of a resonant structure are coupled together to realize a two-pole filter. The filters of this work exhibit low IL values, with fractional bandwidth between 0.08% and 0.2%, and have a very small footprint. This paper reports on the lowest IL in the literature for lateral-extensional thin-film piezoelectric filters with 50 Omega terminations in the GSM frequency band (similar to 900 MHz). The narrow-band filters of this work are fabricated on three ultrananocrystalline diamond substrates to achieve higher frequencies without excessive reduction in the feature size. The paper also thoroughly studies the parameters that affect the performance of such filters and then discussions are evaluated by the statistical data collected from the fabricated wafers.
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