A U-Shaped Linear Ultrasonic Motor Using Longitudinal Vibration Transducers With Double Feet

A U-shaped linear ultrasonic motor using longitudinal vibration transducers with double feet was proposed in this paper. The proposed motor contains a horizontal transducer and two vertical transducers. The horizontal transducer includes two exponential shape horns located at the leading ends, and each vertical transducer contains one exponential shape horn. The horns of the horizontal transducer and the vertical transducer intersect at the tip ends where the driving feet are located. Longitudinal vibrations are superimposed in the motor and generate elliptical motions at the driving feet. The two vibration modes of the motor are discussed, and the motion trajectories of driving feet are deduced. By adjusting the structural parameters, the resonance frequencies of two vibration modes were degenerated. A prototype motor was fabricated and measured. Typical output of the prototype is no-load speed of 854 mm/s and maximum thrust force of 40 N at a voltage of 200 V-rms.