相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article
Physics, Applied
Performance comparison of Pb(Zr0.52Ti0.48)O3-only and Pb(Zr0.52Ti0.48)O3-on-silicon resonators
Hengky Chandrahalim et al.
APPLIED PHYSICS LETTERS (2008)
Article
Engineering, Electrical & Electronic
Piezoelectric-on-silicon lateral bulk acoustic wave micromechanical resonators
Gavin K. Ho et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2008)
Article
Engineering, Electrical & Electronic
Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators
Gianluca Piazza et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2006)