期刊
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
卷 26, 期 4, 页码 613-618出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TSM.2013.2283262
关键词
Production management; semiconductors; cycle time; simulation; data mining
Based on a simulated fab, we first show that forecasting the steady state cycle time of process segments is possible based on certain segment characteristics. We then show that the cycle time predictability is highly dependent on the choice of the segmentation, with the more efficient segmentation corresponding to the product layers.
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